MEMS has a wide range of application prospects in optical communication, RF wireless communication, bioengineering technology, industrial sensors and other civilian and military industries. The micro-electromechanical system (MEMS: Micro Electro-MeChanical System) is a mechanical parts and semiconductor components that forms the shape of the profile in millimeters, constitutes its mechanical parts and semiconductor components in micrometers - nanometers (10-6 m -10) -9 m), micro-electromechanical devices that perceive, identify, control, and processing natural information such as sound, light, heat, magnetine, and movement. It is a very important result of the micron / nanotechnology that is leaping. It integrates micro-motor, microcircuit, miniature sensor, micro-actuator, and devices on a silicon, but also can collect, process and send information or instructions, but also to be independent of the information obtained. Action is taken or according to the external instructions.
Mems Introduction
MEMS solution
What is MEMS TECHNOLOGY?
MEMS Laborative of Carnegie Mellon University
Microelectromechanical Devices on Mosis
