Jiang Chengyu: Microcomputer Electrical System (Full Text)
Jiang Chengyu: Dear, today I am very fortunate to come together to discuss the problem of microelectronics system. I want to explore it from four aspects. The first one, first we have to talk about what is a microelectronics system? This is the most basic concept. Second, we have to mention a problem, why do you want to be miniature? In the third aspect, how can we do miniature, how to make it? Finally, we want to make progress in this area, see what the future is a future.
I will say the first question first, what is a microelectronics system. So everyone, the left left picture is a miniature tweezer, and a diameter is a glass fiber having a 5 micron. This five Micron. On the right, this picture is a contrast of a micro tweezers and traditional tweezers, we usually use the tweezers, the scale of the scale. This is an example to explain that this miniature tweezers can do some of our clamps and operations in the microscopic field. Very small things, how do you do it? For example, it is a cell, such as a fiber, which requires such a tool, and this miniature tweezers are a microelectronics system.
This is a motor, a micro motor made of silicon. This motor has only 60 microns in the middle of the rotor, the lower right picture is a hair, a person's hair, and a comparison of the rotor of the motor, it can be seen that it is better than the human hair, such a small one Miniature motor.
This example is a miniature accelerometer that can measure five gravity accelerations. The middle of the yellow color of the middle is its mass block. This size is 510 microns. It is actually equivalent to us.
One mm
Half, so this scale should be a small scale.
This is what we first take three examples to explain what is a micro-electromechanical system, a sense of understanding. There is currently no unified definition for micro-electromechanical systems in the world. In Japan, it is often referred to as "micro machinery", micro machine. In Europe, commonly referred to as "micro system", micro system. In the United States, it is known as Micro Electro Mechanical System, which is what we said "microelectromechanical system". Then, our China is more likely to say such a statement, think it is complete and accurately portrayed some of the main features of this microelectromechanical system we now.
Then the scale range of the microcomputer system is generally between microns to several millimeters, and it is not necessarily to do less than micrometers, and can go to millimeter level. It can be seen from this picture that our TV is about 10 zero square meters, probably
one meter
about. Ordinary mobile phones, probably around 10 centimeters. The ants painted here are insects, then they have gone a number of millimeters. Well below mm, we show the human hair, there is a smaller gear, and we have a system of MEMS. So it is basically in this figure, from the leftmost 10 negative 6 times to 10 negative 3 times, in this range, it is the scale range we talk about.
In the second aspect, we talk about functional problems. Everyone can see that we can do a very fine metal rod, or you can do a very small gear. This can't be said to be the microelectronics system we said. As a system, we believe that it should include a movable component, or a movable fluid, such a miniature device. Most, the system consisting of these devices; it must have a sensor, it is the Sensor we talk about; or the brake, we also called an actuator, it can do some operations, it is actuator, there must be these two functions, or there One. In addition, it can be linked with the circuit, constitute a small system, which has a signal processing and control function, some have an interface circuit, and some can communicate, and a communication, some There is also a power supply, so this so-called System, it is different from one part. So a system is what we are pursuing, what we have to explore, the microelectromechanical system to be studied. This is a concept. Jiang Chengyu: I just briefly introduced some concepts of microelectromechanical systems. We will ask again, why do you make it small? Do you want to develop a miniature? We must explore what is the benefits of micro.
We visually take a look at it, miniaturize it has a series of advantages, including light weight, low energy consumption, easy to carry.
These advantages are very important in some occasions, such as our airborne airborne equipment, then the airborne equipment is very heavy. Everyone knows that there are many students in our school, and there is a slogan in aviation design and manufacturing (field), which is "
one gram
The weight is struggling. "It sounds like it is very much.
one gram
What is nothing. In fact, aviation and space, especially the aerospace field is,
one gram
It is very important. If we are functional, you can also meet the functionality, performance requirements, then our micro-electromechanical system has a great advantage, it is much smaller than our traditional products.
Here you can give an example, you can take a look. This is often used in aviation and aerospace. Everyone is more familiar with the gyro. This is a traditional gyro. Its quality is more than 1500g; size, this is written here.
15
cm
Multiply
8
cm
Multiply
5
cm
The power consumed is 35 watts; the limit of the measurement is
35
Gram
Cost reached 20,000 US dollars.
Let's take a look at the micro-gyrchics made with MEMS technology. This micro-gyro is the right picture. Its quality is only
10
Gram
It is much smaller than it. Size is
2
cm
Multiply
2
cm
Multiply
0.5
cm
It is also a lot of small. So power, in terms of energy consumption, it only needs a millima to drive. In addition, because of its small size, it is very small, so it measured the limit of significant expansion. It can measure 100K g, which is 100,000 gravity acceleration, which can measure such a wide range. In addition, its price is important, it can be made by $ 500. So from this contrast, I think it is a very sensible understanding, which is our MEMS device, this system why is very powerful vitality.
In the second aspect, we have to talk about it, some occasions must be miniature size, and it will not work. In this Japanese product, since 1991, a research plan for spending a cost of 25 billion yen. In this, there are two target samples, which are to enter the internal equipment for non-destructive detection and repair, such a minor robot. There is also a micro-system that can enter the body's blood vessels, diagnosis and treatment, and the Japanese government have started these two research projects. So in this narrow space, it is our traditional approach to not be implemented. In this case, we must require it (miniature). In addition, after miniaturization, the mechanism and performance of behavior, it has many unexpected advantages. This will come to give another example. From their carrying capacity, it is relative carrying capacity, miniature devices will be much higher than that of our macro devices. why? This we will give a very popular example. One ant in the upper right corner can move one, more than it is much more much more, but you have to lift five elephants, it will definitely can't lift it. So where is its principle? You may learn that if it is the field of mechanical manufacturing, there are some physical fields to know that the scale effect, dimensional effect, Scaling Effect, which is a very important manifestation of a scale effect.
The second feature, its ability to resist damage is strong. Everyone knows that if a ant or a small insect, from a very high place, rarely fell to death, it fell to death, small insects. But if we have dropped from this few meters, I see anyway. What is the reason? It is an enhanced load capacity of something that is small. The second overall size. We don't say ants, we say that materials, the overall size reduction reduces the total number of defects in this structure, the total number of defects is lowered, only a silicon chip of a millimeter, compared to the whole
Four inches
Silicon disk, this disc, its fight against the ability is much stronger.
In the third aspect, the smaller the micro device, the higher its inherent frequency. It can sense the range of external signals. The smaller the quality, the higher the frequency, this is a very important rule of our nature. For example, the frequency of flies and bees, its wings vibration can be high, can vibrate 200 times per second, the wasp can vibrate to thousands of times per second, but you have to call the eagle 振 thousands of times, it is finished, it Big, it can't swim.
Such as the current electronic hearing aid, the electronic hearing aid is a big market, it is the original original, it is very important, how to zoom in, how to enlarge it, rely on a perceived component, it is mainly used by MEMS technology , Doing a small hearing aid, now is also very technical, very clear, then its vibration frequency can be more than 100,000hz. So it can be very clear to perceive the sound of the sound vibration below 20,000, which is the sound below the supersonic wave, it is completely no problem, it can be restored very real, so we have seen this advantage.
Then, the microelectromechanical system we use now, we hope to use our MEMS technology on the related subsystem, which can make it greatly reduced, and performance is basically able to have the original performance, so we will You can build a relatively small complex system. This left is developed by a company in the United States. This micro aircraft can be flying in the air for 30 minutes, and the distance can reach a few kilometers. The micro airplane is now studying, and the remote control of our model is different. The remote control is in the visual distance, which is manipulated by the manipulator. Seeing that your plane is ok, it is called Zuo Fei, the right fly, fly, get off. Miniature aircraft is intelligent, it is autonomous to fly, this is a big difference. Our model aircraft can also do a small, but it is not a mini-air plane in the true sense. Just like this system is very complicated. Let's talk about the microelectromechanical system, how is it playing its role, what is the way. We feel that it is now two ways.
One way is our technology developed through MEMS. This product is used to replace our original traditional products. It is a very important way to improve our original products. For example, in the automotive industry, based on the micro-accelerometer of microelectromechanical technology we now, now, a large number of systems that control the traditional airbag control. Then the traditional accelerometer is discrete, generally in front of the car, then connect it to our control system with the line, and then connect with the airbag. A set of devices such as such a control above, the time is above, because it is lagging behind. In addition, its price is generally dozens of dollars to hundreds of dollars, not very precise accelerometers, very famous for Denmark's BK accelerometer, it is very expensive. Then, the accelerometer processed by MEMS technology is very small, and it is a normally, a whole, very small, installed above, no special connection. It is light, low, low price, less than 10 US dollars, is a very important data for large-scale companies.
The second, I will introduce it to form a new product. That is, MEMS technology, I also open up a new field, perhaps we used to have no known fields at all, or I didn't have such a product, then this, we can take a look, since 1990 The plan of the human genome, when the plan was developed, I hope to determine the sequence of all DNAs in the human genome in more than ten years, and to draw the genetic spectrum, then this life research on human beings, good health, It has great significance. Until in 1998, the world researchers used a total of 6% of this workload for nearly 10 years.
In 1998, the human chip invented the capillary electrophoresis. After the chip introduced, scientists completed the remaining 94% of the work in less than two years. So in June 2000, the United States, China, Japanese, Britain, Law, German scientists announced the sketch of the human genome work to the world. This is an extremely important role in the birth of bioconagals. Then the biological chip is through MEMS processing technology, on the surface of the solid chip, we can build a microfluidic analysis unit and system, which can achieve accurate, rapid and large amounts of information testing of genes, proteins, and other biological components.
Jiang Chengyu: So since the microelectromechanical system is so useful, there is a broad prospect, we naturally ask questions, such a small system, we are hard to imagine, what is 60 micron motor, rotation, how to make it? The origin of this idea is in 1959. The middle of the last century, has a famous physicist called Richard Filman, he is the winner of Nobel Prize, and he is in a famous speech in California Institute of Technology. First, an idea of developing miniature devices and micro-technologies is proposed. So in 1961, the first silicon pressure sensor has been admitted, which indicates that the material of the silicon can not only be microelectronics, but also the structural material of the microelectronics. In 1967, the technology of surface micro-processing was coming, that is, Surface Micro Machining, this technology came. It can form a microstructure of activity freedom on the silicon chain, and we can create some miniatical thin structures on the silicon. In 1970, the first silicon micro-speed gauge. In 1979, HP developed the first inkjet head obtained by micro-processed, now the printer's inkjet head, there are many small small holes above, and when is it spray, when is it not spray, which hole spray, which hole No spray, this is a very complicated technology. Now everyone feels very natural, in fact, this is very learning. In 1992, the United States North Carolina Microelectronics Center produced a standardized surface micro-machined process, which is our micro-machining technology and gradually move forward.
We can now review this technique represented by the United States. It is actually the main means of manufacturing microcomputer system from integrated circuit processing technology, physical processing technology, surface processing technology, and bonding technology. .
In 1982, a so-called LIGA technology was born in Germany. It is actually a very characteristic of photolithography, electroforming and injection molding, which can make micromechanical with great deep than structure. Our ordinary photolithography, can't engrave very deep, it can be engraved, a surface graphic it can be engraved, through X-ray, this method is also very useful.
The third is represented by Japan. From the 1990s, the Japanese began, and the development ideas proposed, with the United States, not the German. What is it saying, it is made with a large machine manufacturing small machine, a small machine to make a microtorrower, and he is walking. But it also has a character, because in those ways, we are hard to do very small, such as the tiny part of the metal, and this method of Japan can do very small. This is a Japanese, and a small machine is used to make a small machine. It has made a small lathe. This trip is a centimeter. This is very small, and the level is quite high. On the right, this is some universities in Japan. Their research and development is called light-induced microcircuit. This robot is also small, you see it is smaller than a coin. This robot has 98 micro parts, it is not easy. You said that such a small thing is 98 micro parts, but also micro-loading, this level is also very high.
Then there is another kind of thing now, doing it from the bottom floor, what should I do? It actually uses a special instrument, such as the atomic power instrument, use this instrument to manipulate the molecules and atoms, to form a micro mechanism, that is, I put the molecules, this pile, this pile, like a wall, this molecule It is a piece of brick, that is a tile, then this is a cement, how to make it, this is a way from the bottom. Of course, this way should now form some very useful things, and there must be a distance. In the fourth aspect, I want to introduce, do some outlook, since this is a little elf, it is indeed a small elner, it can do a lot of things we can't do, or do better than before, so much thing. But I feel a lot of people, they will have a misunderstanding, they think that the microelectromechanical system seems to be very deep, just in the spring of the academic research in the spring of the spring. In fact, we are already using it, many places may be used, maybe everyone is not conscious, but these micro-systems are often used as a whole product, just better than a refrigerator, a washing machine gives you this way. . It is often an integral part of a large system, which contributes its specific features to a large system of full features, completing a very good feature, which quietly changes the face of our lives.
This is the micro disk developed by IBM, the microfrint, the right is the microcomputer used by the digital camera, and the memory cell inside and it reads and writes, and it is used to use our MEMS technology. Some use it to manufacture.
This right is an internal mechanism, DMD, which is a microscope, the microscope, and it takes out. Comprehensively, you can form a high-definition, high quality TV. So what is this TV level? Let's see this is a picture of a parrot. Then we are currently above the market, say the best TV. Everyone now feels better is the plasma, plasma TV now just came out, about more than 30,000 yuan, it is very good. However, the plasma is less than this LCD, it is a LCD displayed with a liquid crystal, and now it has been developed. However, the LCD is more than the DLP doing this silicon microscope. Therefore, our grade, quality, in this TV, is a much higher level than now, this is a manifestation of MEMS technology.
We finally told this elf and the big stage. How big is this stage? Let's do a market share estimate, estimate. On the left, this has already happened. The output value produced by MEMS technology has reached 30 billion US dollars in 2000. According to scientists, it will reach 68 billion US dollars in 2005, which should be a big market. The share. So biggest share, or in the IT industry. The second largest industry is in medical, in Medical, then in terms of transportation and our mobile phones, Tele-Communication, also account for a considerable market share, respectively.
In addition, MEMS is emphasizing system integration, emphasizing electromechanical integration. Now, can you integrate with light? This is an important trend in the future development. Now let's make a so-called Moems, plus an Optical, is Optical MEMS, is a system that is currently converting such a system. Now the full NIC communicates, its capacity is very large, more convenient and fast. Then, the optical switches, optical wave multiplexers, filters, modulators, attenuators, etc. They are small, low cost, small power consumption, high precision requirements, which has become a very good field of MEMS. . So we feel that no one can accurately predict what new microelectromechanical system will emerge, because too much. No one is able to accurately predict that the product we have learned from the micro-electromechanical system will be changed to the face, because it is too fast, the impact is too wider. I feel that after MEMS, it may be next to enter the army, it may go to the NEMS field, in that field, it may present more magical features, show
In front of our world. Just as invented the transistor in this year, the development of microelectronics technology can be said to be a new technique in the world; the appearance of transistors, the appearance of the computer. Nowadays, there are still many scientists who think that micro-electromechanical systems will bring a new technology revolution to humans, let us wait and see, come waiting, come to contribute, in this field.
Finally, I want to end with a sentence, the tiny elf makes the world more magical and makes life better. Thank you!
Xu Ge Hui: Good, very feeling
Xie Jiang
Professor reveals us the magical of this miniature world! Then I found out that I got a question of a netizen. The net name of this netizen is "sesame opening". He said that his parents are doctors. He also hopes that he can use advanced technology to save more lives. He knows that the country like Japan is studying micro robots, enters the human body to help clean the body's blood vessels. It was found that even removing cancer cells, but he didn't understand that since the micro-machine power can produce a small machine than the hair silk, why can't you do this now? Isn't it possible to make a miniature robot into the human body? He doesn't know where this technology bottleneck is in place.
Jiang Chengyu: We have just talked about the electric motor, which is very fine, in fact, there is still 60 microns, you can calculate it again, or big, this is just a motor. We reiterate, if this robot can enter the human blood vessel, one is going, and it is still going to work, it is more like seeing this fat, it will cut it, it will bring it. So many things, this, I have just said that the manufacture of components of the machine is very complicated. To tell the truth, we can't do this now. He has voted so much in Japan, and he may not do this, he still can't do it now. However, you can't do this because we can't do it. Now they are envisaged to focus on some key parts of the human body. So you just said, if you want to make this kind of thing like a blood vessel, I estimate that it is going to our nano-category. To do that small machine, I think we are now from theory On, still in practice, the knowledge is not enough.
Xu Ge Hui: Then you can foresee it, how long is it possible to achieve?
Jiang Chengyu: Because this technology is really difficult to predict, I think if it is a system of mechanical, like a robot to clean the blood vessel, I am estimated that I have to be at least two or 30 years, I estimate that II, three It can't be done in ten years. Xu Gehui: However, the development of technology will often exceed our imagination.
Jiang Chengyu: That is also possible.
Xu Ge Hui: I hope that this will be like this.
Jiang Chengyu: Let us fall in the glasses.
Student: Ginger President, Hello! I want to know that people have encountered this system even more.
What is the most difficult part? Is it its electronic system or its mechanical part? Thank you!
Jiang Chengyu: It seems that the difficulty of mechanical parts is more difficult. To do a very small mechanical part, we need very precise equipment, and we now do this concept of microelectromechanical systems, and our original airplane, the concept of ships, It's different now. If it is a very small plane, it is different from our traditional aircraft, including its energy, its driver, is it still a big jet engine, you can do it Is it a millimeter or a millimeter jet engine? This is impossible, so this program is not valid. So we are not to narrow this macro thing to make a small thing, this road is already (unconnected), it must be a different approach. So we feel the whole, this machine is more difficult. And now the silicon processing technology, it is on the circuit, it is manufactured above, it is already easy to drive, this is a mature technology. Of course, we must also develop it in manufacturing microstructure, in terms of physical processing, and face processing. development of. But in general, it is easy to do a circuit than making mechanical.
Student: Ginger President, Hello! I would like to ask, first of all, many products are products from foreign products, such as Intel, IBM's products, I want to know, now some products of domestic autonomy, and patented technology and Some well-known companies now develop.
Second, I want to ask, as some ordinary students, graduate students, when you want to join this microelectromechanical system
When you do, what kind of knowledge should be done to better carry out this more developed research? Thank you!
Jiang Chengyu: Everyone knows that there are many three-capital companies and foreign-owned enterprises in China, like Motorola, Japan's company, now I heard that Mercedes-Benz is coming to China, now it is said that these big companies, the world's famous company, the first level ? ? The company came to China, very much. So inrect in their products, there is a big one is related to MEMS, and some companies have established their own R & D centers, it requires their company's products to be in the leading position, so It does it specially developed institutions. So our country, some big companies in our country, such as ZTE, Huawei, etc., many of these companies like Shanghai, actually use such products. But you said that domestic intellectual property rights, some of our work now, do you say that there is abroad? It has it already have it. For example, like accelerometers, icard gornes, but we try to make a more characteristic, or more performance and function more than it. We are also doing some, is it not done yet, let's conduct some exploration, and now the Ministry of Science and Technology is developing China's medium and long-term development plan, has been a development plan from 2020. These systems have important status in MEMS. So we now hope to be surprising, we must get a new way to walk, and come to the road of our own research. It is hoping that it is not entirely the way to track others. You just talk about the second question, that is, as a student, whether you are undergraduate or postgraduate, if you want to explore in this area, or if you want to join this group, what kind of knowledge you need to be prepared. This micro-silicon electromechanical system is actually a comprehensive result of multidisciplinary synthesis, which is a very single discipline that is the original discipline. For example, we have some majors, it is very special, you are just in this field. And the microelectromechanical system we said is very broad knowledge. Machine, electricity, light, our traditional mechanical design, some things in mechanical principles you have to understand, but moving to it is still not necessarily used, so there are some new problems in this. So I think a comprehensive workman in the comprehensive knowledge of technology. In addition, you have to have a very prominent feature in this area, because this area is very wide, maybe you are mainly, some people are electricity, such as molecular, such as iconic acceleration It is used to use a lot of mechanics knowledge, and the knowledge of physics is needed.
But not, everyone is very complete, according to the direction of your research, to get your information, you come to see the relevant literature to expand your scope. This way, it can be easier to have some good results in your field.
